It was noted that no film deposition was observed when HMDS alone was supplied to the substrates without any ion beam injections. On the other hand, in the cases of N + ion beam irradiation, silicon nitride films involving small amount of carbon were formed. The FTIR and XPS results showed that silicon carbide films containing small amount of nitrogen were formed when Ar + ions were injected in conjunction with HMDS. The films were then analyzed by Fourier transform infrared (FTIR) spectroscopy, stylus profilometer, X-ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy (XPS). After the experiments, films were found to be deposited on the substrates. Temperature of the Si substrate was set at 540 ☌. We selected Ar + and N + as the ion beam. In this study, both HMDS and ion beam were simultaneously injected onto a Si substrate. If there is a strong demand for kinetic energies, it could be implemented in future versions.We proposed an experimental methodology for producing films on substrates with an ion beam induced chemical vapor deposition (IBICVD) method using hexamethyldisilazane (HMDS) as a source material.
Only a positive 'binding energy' scale works - however, this should be the most common case.
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#XPS PEAK SOFTWARE UPGRADE#
#XPS PEAK SOFTWARE DOWNLOAD#
If you still run Igor 6, you have to download a previous release. The Igor 7/8 version is not compatible with Igor 6. XPST was initially developed with Igor 5, but a major revision was made with Igor 7. Several changes in the newest version of XPST were made according to this book about programming Igor. There is also a youtube channel with tutorials. As a special feature, a flexible multiplet function was implemented to facilitate a convenient analysis of complex spectra. You can generate fit templates and you can export entire fit projects to share them with your co-workers. When a XPST fit project is started, a corresponding subfolder with all required data is generated and saved within the Igor experiment. It includes various graphical interfaces as well as commandline functions to facilitate the workup of XPS data. XPST is a program package for the analysis of X-ray Photoelectron Spectroscopy (XPS) data.